2026-01-28
Dry screw vacuum pumps are advanced vacuum generation devices. They create vacuum by using two intermeshing but non-contacting screw rotors that rotate synchronously in opposite directions inside the pump chamber. Unlike traditional oil-sealed vacuum pumps, dry screw vacuum pumps require no working fluid and can provide a clean, contamination-free vacuum environment. Therefore, they are widely used in industries with extremely high cleanliness requirements, such as semiconductors, photovoltaics, chemicals, and pharmaceuticals.
A dry screw vacuum pump generates suction and exhaust through the synchronized reverse rotation of two screw rotors inside the pump chamber. During operation, the gas is continuously drawn in, compressed, and discharged as the rotors rotate, forming a stable vacuum process.
Because there is no oil or liquid involved in the pumping chamber, the dry screw vacuum pump can effectively avoid contamination caused by working fluids. This makes it especially suitable for applications that require clean vacuum conditions, stable operation, and reliable process control.
Compared with conventional oil-sealed vacuum pumps, dry screw vacuum pumps offer cleaner operation, lower maintenance requirements, and better adaptability to demanding industrial processes. They have become an important vacuum solution for modern manufacturing fields such as semiconductor production, photovoltaic processing, chemical engineering, pharmaceutical production, and high-end laboratory applications.
2. Main Technical Features
Fully Dry Operation
No working fluid is required, which prevents oil vapor contamination and makes the pump suitable for clean environments.
Wide Pumping Speed Range
A single-stage pump can achieve a wide vacuum range from 10⁵ to 10⁻² Pa.
Corrosion-Resistant Design
Special coatings and material treatments can be applied to adapt to corrosive gas environments.
Easy Maintenance
With a relatively simple structure, the pump offers long maintenance intervals and low operating costs.
Low Vibration and Low Noise
The well-balanced rotor design ensures smooth, stable, and low-noise operation.
