The dry screw vacuum pump is a type of vacuum pumping equipment that uses a pair of screws rotating synchronously at high speed in opposite directions inside the pump casing to generate suction and exhaust. As an upgraded alternative to oil-sealed vacuum pumps, it is suitable for applications involving gases containing large amounts of water vapor and small amounts of dust. Screw vacuum pumps are widely used in industries with high requirements for clean vacuum environments, such as pharmaceuticals, chemicals, and semiconductors.
Key Application Areas
Semiconductor and Electronics Industry
This is one of the most important high-end application fields for dry screw vacuum pumps. They are almost indispensable equipment in modern semiconductor production lines.
Chemical vapor deposition (CVD) and physical vapor deposition (PVD) in wafer manufacturing
Plasma etching and ion implantation processes
Vacuum packaging and testing environments
Photovoltaic Industry
Thin-film deposition processes in solar cell production
Vacuum environment control during silicon wafer processing
Pharmaceutical and Biotechnology Industries
Lyophilization processes, also known as freeze drying
Vacuum environments for pharmaceutical packaging
Sterile environments in biological product manufacturing
Chemical and Materials Science Industries
Distillation and extraction in fine chemical production
Synthesis and processing of special materials
Supporting applications for analytical instruments
Scientific Research and Laboratories
Synchrotron radiation facilities
Surface analysis instruments
Vacuum simulation environments

Why Choose Dry Screw Vacuum Pumps?
In the above fields, dry screw vacuum pumps are replacing traditional oil-sealed rotary vane pumps, water ring pumps, and other conventional vacuum equipment. They mainly solve the following key challenges:
Pollution Control: Completely oil-free operation helps protect processes and products from contamination.
Wide Medium Compatibility: Capable of handling demanding process gases while reducing the burden of waste gas treatment.
Lower Operating Costs: Eliminates the consumption and disposal costs of oil, water, and other consumables, with longer maintenance intervals.
Environmental Protection and Safety: No waste oil or wastewater discharge, making the system more environmentally friendly. It also offers safer operation when handling flammable gases.
Stable Performance: Maintains stable pumping speed across a wide pressure range.
Therefore, dry screw vacuum pumps have become essential equipment for advanced manufacturing, precision processing, high-end scientific research, green chemical production, and other industries pursuing high quality, high reliability, and sustainable development.
Hangzhou Xin’anjiang Industrial Pump Co., Ltd., a vacuum pump equipment manufacturer in Zhejiang Province, specializes in dry screw vacuum pumps, water jet vacuum pumps, water ring vacuum pumps, liquid ring vacuum pumps, oil-free vacuum pumps, Roots vacuum pumps, steel-lined PTFE vacuum units, stainless steel vacuum units, steel-lined PE / PO storage tanks, steel-lined PTFE storage tanks, stainless steel storage tanks, PPH / HDPE storage tanks, complete waste gas treatment systems, acid mist purification towers, anti-corrosion storage tanks, vacuum tanks, metering tanks, chemical centrifugal pumps, slurry pumps, magnetic drive pumps, self-priming pumps, pipeline pumps, and other industrial equipment.
Our company is a high-tech enterprise integrating scientific research, design, production, sales, and system integration. It has been listed among Jiande City’s key industrial enterprises for nearly seven consecutive years and was recognized as a National High-Tech Enterprise in 2012. The company continues to accelerate technological innovation and new product development. It currently owns the Hangzhou Xin’anjiang Anti-Corrosion Industrial Pump Provincial High-Tech Enterprise R&D Center and holds 45 national patented technologies, including 4 invention patents, such as cooling systems for Roots vacuum pumps.